Hi,
Could you try the following steps to reinstall IIS?
1.Uninstall IIS
2.Reboot system
3.Uninstall WAS (Windows Process Activation Service)- WAS feature package is the dependent package for the IIS feature package.
4.Reboot system
5.Reinstall IIS
If your problem still persist, please post the relevant event logs and IIS installation logs here. There should be some more detailed reason that help us address the root cause.